ISSPMT
Institute of Solid State Physics, Materials Science and Technologies
NAS of Ukraine

CVD and PACVD methods of structural material production


Technological processes of making products in the form of crucibles, pipelines, high-pressure vessels, heaters, equipment for high-temperature vacuum furnaces are developed.

CVD and PACVD methods

Coatings can be deposited on complex-shape products, on the internal surface of blind- and through openings.

Characteristics:
  • Microhardness is 350 - 700 kg/mm2.
  • Density is 19,25 - 19,30 g/cm3.
  • Durability of press-stamped tool increases by a factor of 4 - 5 times.
  • Heat resistance of products is - to 2500°С.

In particular, a plasma-chemical method is used to obtain products and articles coated with tungsten, molybdenum, boron nitride, which are designed for operation under high-temperature and high-pressure conditions.

Fields of the product applications:
  • in the high-temperature equipment at a working temperature up to 2500°C as tungsten crucibles and heaters for growing single crystals by the quantum radio electronics (ruby, sapphire, etc.);
  • in the electronics in the form of coatings for making ohmic contacts, metallization of silicon plates and hot cathodes, radiation protection of electronic modules, in high-power pulse devices;
  • in the nuclear power engineering in the form of coatings on nuclear fuel particles, on capsules with isotope sources, on emitters for thermionic converters of thermal energy into electric energy;
  • in the chemical industry in the form of corrosion-resistant coatings;
  • for the defense of press-stamped tools used for the synthesis of pharmaceutical particles.

Gas-phase crystallization methods being capable to produce qualitative condensates and characterized by a high deposition rate (to 500... 600 microns/h) allow one to form coatings of equal thicknesses on the complex-shape products. These methods are realized with the use of simple equipment.

The essence of the method consists in the thermal decomposition or hydrogen reduction of metal-containing compounds (carbides, chlorides, fluorides, etc.) on the surface heated from 400 to 1100°C with formation of the condensed solid metal phase.



Installation 'Yantar

Installation "Yantar"

Making of alloys with simultaneous reduction of several metal-containing gases or compounds in the form of carbides, oxides, nitrides, borides, silicides is possible with the use of the processes of crystallization of metals with additions of carboniferous gas, oxygen, nitrogen, boron chloride or silicon chloride respectively.

Installation Potok

Installation "Potok"

Reaction chambers of the installations "Siren’", "Yantar’", "Potok" provide involving of reactions of gas-phase and plasma-chemical reduction of metal-containing gases during formation of products and deposition of corrosion-resistant, wear-resistant and heat-resistant coatings. Such coatings are applied in the mechanical engineering, chemical industry, rocket production, electronic equipment, medicine.

Reactors and press –stamped tools with coatings passed successfully tests at the plant of endocrine preparations in Kharkov.

Crucibles are used in the process of single-crystal growing by quantum electronics (the Institute “Monocrystals” ,Kharkov) and in the process of precious metal evaporation for making IC elements (the enterprise “Saturn”, Kiev)

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