Methods of the laboratory of physics of interaction of ion beams with materials
Characteristics of methods used for investigation
| Nuclear-physical methods | Element composition, Z | Fracture by depth , A | Analyzed layer, mkm | Detection limit mass,% |
|---|---|---|---|---|
| Nuclear reactions (backward scattering) | ≥ 1 | 3000 | 1…10 | 10…10-5 |
| Nuclear reactions (backward scattering) | ≥ 1 | 50...300 | 0.5 | 10…10-5 |
| Nuclear reactions (scattering “forward”) | ≥ 1 | 50...300 | 0.5 | 10…10-5 |
| Channeling | ≥ 2 | 100 | 1…3 | 10-1..10-6 |
| Rutherford backward scattering | ≥ 2 | 100 | 1…3 | 10-1..10-6 |
| Thermal-desorption mass-spectrometry | Partial pressure ~4*10-8Pa or 1010atoms of analyzed gas |
